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Molecular Vapor Deposition (MVD) for MEMS, NIL, Microfluidics and Nanotechnology | |
Keywords : MVD, deposition, hydrophobic, hydrophilic, self-assembled, monolayer, MEMS, nanolayer, anti-stiction, stiction, release, de-molding, passivation, wetting, de-wetting, surface engineering, nanocoating |
Last Update : | 23/December/2011 |
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