idonus - innovations for microsystem fabrication | |
Idonus is producing a Hydro Fluoric Vapor Phase Etching (HF VPE) apparatus for sticking free silicon dioxide etching in micro fabrication. | |
Keywords : idonus, vapour phase etching, vapor phase etching, vapour phase etcher, vapor phase etcher, vapour etcher, vapor etcher, vapour etching, vapor etching, MEMS, sticking free release, sticking free, hotplate, electrostatic chuck, hf, hydro fluoric, hydrofluo | |
H1 tags : idonus - innovations for microsystem fabrication |
Last Update : | 02/January/2012 |
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