Innovative Robotics - SCARA ROBOT WAFER TRANSPORT MASK HANDLING IR-820 3-FOUP DUAL WRIST EFEM AHMS 5th | |
SCARA, Selectively Compliant, Articulated Robot Arm, 4-axis, dual arm, single arm, dual wrist, end effector, edge gripper, CE compliant, SEMI compliant, automatic blending, high throughput, small footprint, cost of ownership, COO, 3-axis, R-theta, sorte | |
Keywords : SCARA, Selectively Compliant, Articulated Robot Arm, 4-axis, dual arm, single arm, dual wrist, end effector, edge gripper, CE compliant, SEMI compliant, automatic blending, high throughput, small footprint, cost of ownership, COO, 3-axis, R-theta, sorte |
Last Update : | 04/January/2012 |
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